Refined Thermal Flow Sensors by Transduction Engineering

نویسندگان

  • F. Kohl
  • F. Keplinger
  • R. Beigelbeck
  • J. Kuntner
  • J. Schalko
  • A. Jachimowicz
چکیده

Miniaturized flow sensors composed of a thin membrane supporting appropriately positioned heating resistors and temperature sensors were studied by computer-numeric analysis. Significant improvements of the steady-flow transduction characteristics as well as the responses to step-like changes of the dissipated power are feasible by design modifications and new transduction schemes.

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تاریخ انتشار 2006